[China Instrument Network Instrument R&D] A few days ago, two "new multi-function 1m laser ratio meter devices" developed by the China Institute of Metrology (hereinafter referred to as "China Institute of Metrology") and Changzhou Metrology and Testing Technology Institute, etc. The linear scale measurement accuracy test was completed at the Measurement Technology Institute of Changzhou City, Jiangsu Province, and the Wuxi Metrology and Measurement Center Laboratory. The device realizes the measurement uncertainty of the line ruler U=(0.1+0.1L)μm(k=3,L:m), and the repeatability is better than 30nm, reaching the domestic advanced level, and can satisfy the dynamics of existing line scales. High-precision calibration effectively improves the level of one-dimension precision measurement capabilities of the relevant metrology and technical institutes.
Equipment manufacturing is a traditional and advantageous industry in Changzhou, Wuxi, and other cities in the Yangtze River Delta region. In recent years, it has been developing toward high-end equipment manufacturing with high technological content and high added value. This poses new and higher requirements for the accuracy, scope, and type of the “eyes†of the manufacturing industry—measurements of length geometry. To this end, the China Metrology Institute and the Changzhou Metrology and Measurement Technology Research Institute took the lead, in conjunction with Wuxi City Metrology and Testing Center, Changchun University of Science and Technology, AVIC Qingdao Outpost Precision Instrument Co., Ltd. and other units, launched a new type of multi-function 1m laser than long The development of the instrument aims to build a multi-functional and scalable one-dimensional precision length measurement equipment and scientific research experiment platform for Changzhou and Wuxi metrology and technical organizations, respectively, to upgrade its online scale equal length standard instrument for high-end manufacturing in the surrounding areas. Calibration and other length geometry precision measurement service capabilities.
According to Sun Shuanghua, deputy researcher of China Metrology Institute, the device borrowed key technologies such as precision laser interferometry length measurement, high-precision electro-optical microscope dynamic aiming, and precision air flotation control from the China Institute of Metrology, “Laboratory Benchmark for Laser Interferometer Linesâ€. Dynamic and high-precision calibration of line rulers, laser interferometers, and displacement sensors. The device body adopts natural granite structure and is carefully designed based on deformation analysis and modeling. The bed size is 3.4m×1m×0.7m, the overall weight is 9 tons, and the straightness of the guide rail is better than 1μm/m, which can effectively avoid the mobile work. The mechanical deformation caused by Taiwan's movement, good anti-seismic performance and excellent long-term stability. In addition, the working distance of the microscope reaches 28mm, which is suitable for the inspection of the line surface of various line thickness scales towards the objective lens or the back object lens. The calibration of the line scale is consistent with its use status, which ensures the accuracy and reliability of the value transmission.
(Original title: China Metrology Institute assists local metrology and technical institutes to improve the length of precision measurement capabilities)
Equipment manufacturing is a traditional and advantageous industry in Changzhou, Wuxi, and other cities in the Yangtze River Delta region. In recent years, it has been developing toward high-end equipment manufacturing with high technological content and high added value. This poses new and higher requirements for the accuracy, scope, and type of the “eyes†of the manufacturing industry—measurements of length geometry. To this end, the China Metrology Institute and the Changzhou Metrology and Measurement Technology Research Institute took the lead, in conjunction with Wuxi City Metrology and Testing Center, Changchun University of Science and Technology, AVIC Qingdao Outpost Precision Instrument Co., Ltd. and other units, launched a new type of multi-function 1m laser than long The development of the instrument aims to build a multi-functional and scalable one-dimensional precision length measurement equipment and scientific research experiment platform for Changzhou and Wuxi metrology and technical organizations, respectively, to upgrade its online scale equal length standard instrument for high-end manufacturing in the surrounding areas. Calibration and other length geometry precision measurement service capabilities.
According to Sun Shuanghua, deputy researcher of China Metrology Institute, the device borrowed key technologies such as precision laser interferometry length measurement, high-precision electro-optical microscope dynamic aiming, and precision air flotation control from the China Institute of Metrology, “Laboratory Benchmark for Laser Interferometer Linesâ€. Dynamic and high-precision calibration of line rulers, laser interferometers, and displacement sensors. The device body adopts natural granite structure and is carefully designed based on deformation analysis and modeling. The bed size is 3.4m×1m×0.7m, the overall weight is 9 tons, and the straightness of the guide rail is better than 1μm/m, which can effectively avoid the mobile work. The mechanical deformation caused by Taiwan's movement, good anti-seismic performance and excellent long-term stability. In addition, the working distance of the microscope reaches 28mm, which is suitable for the inspection of the line surface of various line thickness scales towards the objective lens or the back object lens. The calibration of the line scale is consistent with its use status, which ensures the accuracy and reliability of the value transmission.
(Original title: China Metrology Institute assists local metrology and technical institutes to improve the length of precision measurement capabilities)
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